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QCL
ridge waveguide and BH (buried-heterostructure)
waveguide
3-D
view of a QCL laser mesa prepared for BH regrowth
MOCVD
reactor and glove box (wafer loading and operation area)
Deep etched gratings (grating pitch ~755nm, etching depth
~400nm)
QCL arrays (5 emitters, center-to-center distance ~26um, ridge
width ~12um)
BH re-growth for a QCL
Assembly of tunable DBR QCL
Electrical derivative measurement of QCL
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